Thermal Desorption Analysis of Polymer Film under High Vacuum - TDS-MS -

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Summary

TDS-MS makes it possible to detect a desorpted component at high sensitivity by the mass spectrometer, while raising temperature under high vacuum. Since analysis is performed while raising temperature, the desorpted component can be compared at different temperatures. TDS-SM is most suitable for evaluating highperformance resin products that are expected to be used under conditions in which they are used in heated conditions under high vacuum. Objects of analysis include the resin materials that are used in the process of manufacturing semiconductors and devices and the resin construction materials for the manufacturing equipment therefor, among other things.

Example of analysis: TDS-MS measurement of polyvinylidence chloride film

Search Number 4054

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