Surface Roughness Measurement Method

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Summary

The difference in the surface profile may have a significant impact on the physical properties including adhesion, gloss and sliding properties. On the other hand, surface profile measurement equipment is available in various types. Structural information that has a correlation with physical properties can be obtained by selecting the type of equipment that is suitable for the purpose of profile measurement and expected size.

Characteristics of various devices

  Scanning probe
microscope (SPM)
Noncontact interference
microscope (WYKO)
Laser microscope Surface roughness
(contact needle method)
Resolution
Z (height)
X,Y (planes)
Z:0.01nm
X,Y:0.2nm
Z:0.1nm
X,Y:1μm or so
Z:5nm
X,Y:120nm
Z:0.02μm1)
X (trans. direction):0.1μm
Measurement
region
XY
0.5×0.5μm
~150×150μm
XY
0.06×0.04mm
~4.9×3.7mm
XY
16×16μm
~640×640μm2)
X
0.15~150mm
Feed pitch(Y direction)
1μm~10mm
Max. movability
Z (height)
15μm 1mm 1mm 400μm
Characteristics
  • High resolution
    (Å order)
  • Samples with a widerange, highly-uneven surface are unmeasurable.
  • Noncontact measurement
  • Samples with a widerange, highly-uneven surface are measurable
  • Not suitable for samples with steep profile.
  • Noncontact measurement
  • Good at measurement of samples with steep profile, high XY resolution (compared with WYKO)
  • Low Z resolution, small measurement area (compared with WYKO)
  • Conforms to international standards (JIS, ISO).
  • The contact needle damages the surface.

1) For Z, resolution at time of 800μ measurement; for X, resolution at time of 100mm measurement (which varies with magnification)
2) It is possible to expand by binding-together.

Cases of measurements

Observation of PE film by WYKO Since measurement is made in a wide area, information on undulation as well as microstructure can be obtained.

Observation of tape tackifier profile with laser microscope Since this method is of contact type, even soft samples can be observed nondestructively, and even samples whose surface reflectivity is not high can be observed without deposition.

Search Number 4040

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