Determination of nano-size Foreign Object -nano IR-



NanoIR is the technology for nano scale spatial resolution which is a combined technology of IR and AFM.
NanoIR can get information on chemical characterization of nano level size of a contamination, thermal and mechanical properties and surface roughness of a sample.


Thin-sliced sample on ZnSe prism is thermaly expanded instantly by absorbing Iinfrared light when tunable pulse laser is irradiated. When the expansion detected by cantilever is plotted against wave length, it is approximate data of infrared spectrum.

Wave length

An Example: Analysis of whitning of polymer

A particle(a size of several μms) which may have caused whitening of a film was observed by SEM. NanoIR could identify this particle as a contaminated PC+PBT.

Search Number 1042

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